Phosphorus doping of silicon by proton induced nuclear reactions
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| Campo DC | Valor | Idioma |
|---|---|---|
| dc.contributor | Interacción de Partículas Cargadas con la Materia | es |
| dc.contributor.author | Abril, Isabel | - |
| dc.contributor.author | García Molina, Rafael | - |
| dc.contributor.author | Erokhin, Konstantin M. | - |
| dc.contributor.author | Kalashnikov, Nicolay P. | - |
| dc.contributor.other | Universidad de Alicante. Departamento de Física Aplicada | es |
| dc.date.accessioned | 2012-11-26T10:31:44Z | - |
| dc.date.available | 2012-11-26T10:31:44Z | - |
| dc.date.issued | 1995-05-29 | - |
| dc.identifier.citation | ABRIL, Isabel, et al. “Phosphorus doping of silicon by proton induced nuclear reactions”. Applied Physics Letters. Vol. 66, No. 22 (29 May 1995). ISSN 0003-6951, pp. 3036-3038 | es |
| dc.identifier.issn | 0003-6951 (Print) | - |
| dc.identifier.issn | 1077-3118 (Online) | - |
| dc.identifier.uri | http://hdl.handle.net/10045/25348 | - |
| dc.description.abstract | We propose a method to dope silicon with phosphorus by means of the nuclear resonant reaction 30Si(p,γ)31P, which takes place when a natural silicon target is bombarded with a few MeV proton beam. This alternative method considerably reduces the usual target damage produced by the more commonly used direct phosphorus implantation. | es |
| dc.description.sponsorship | Partial support from the Spanish DGICYT (Project Nos. PB92-0341 and PB93-1125). N.P.K. thanks the Spanish DGICYT for financial support (SAB93-0182) during his sabbatical stay in the Universidad de Murcia. | es |
| dc.language | eng | es |
| dc.publisher | American Institute of Physics | es |
| dc.rights | Copyright © 1995 American Institute of Physics | es |
| dc.subject | Phosphorus doping | es |
| dc.subject | Silicon | es |
| dc.subject | Proton | es |
| dc.subject | Nuclear resonant reaction | es |
| dc.subject.other | Física Aplicada | es |
| dc.title | Phosphorus doping of silicon by proton induced nuclear reactions | es |
| dc.type | info:eu-repo/semantics/article | es |
| dc.peerreviewed | si | es |
| dc.identifier.doi | 10.1063/1.114269 | - |
| dc.relation.publisherversion | http://dx.doi.org/10.1063/1.114269 | es |
| dc.rights.accessRights | info:eu-repo/semantics/restrictedAccess | es |
| Aparece en las colecciones: | INV - IPCM - Artículos de Revistas | |
Archivos en este ítem:
| Archivo | Descripción | Tamaño | Formato | |
|---|---|---|---|---|
 1995ApplPhysLett66(1995)3036-P_doping.pdf | Versión final (acceso restringido) | 83,12 kB | Adobe PDF | Abrir Solicitar una copia |
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