Abril, Isabel, García Molina, Rafael, Erokhin, Konstantin M., Kalashnikov, Nicolay P.
Phosphorus doping of silicon by proton induced nuclear reactions
ABRIL, Isabel, et al. “Phosphorus doping of silicon by proton induced nuclear reactions”. Applied Physics Letters. Vol. 66, No. 22 (29 May 1995). ISSN 0003-6951, pp. 3036-3038
URI: http://hdl.handle.net/10045/25348
DOI: 10.1063/1.114269
ISSN: 0003-6951 (Print)
Abstract: 
We propose a method to dope silicon with phosphorus by means of the nuclear resonant reaction 30Si(p,γ)31P, which takes place when a natural silicon target is bombarded with a few MeV proton beam. This alternative method considerably reduces the usual target damage produced by the more commonly used direct phosphorus implantation.
Keywords:Phosphorus doping, Silicon, Proton, Nuclear resonant reaction
American Institute of Physics
info:eu-repo/semantics/article