Grabado seco de GaAs: influencia del bombardeo iónico
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http://hdl.handle.net/10045/4131
| Title: | Grabado seco de GaAs: influencia del bombardeo iónico |
|---|---|
| Authors: | Villalvilla, José M. |
| Research Director: | Vallés Abarca, José Antonio |
| Center, Department or Service: | Universidad de Alicante. Departamento de Física Aplicada |
| Keywords: | Grabado de GaAs | Haces iónicos anchos | Bombardeo iónico |
| Knowledge Area: | Física Aplicada |
| Date Created: | 1992 |
| Issue Date: | 1992 |
| Date of defense: | 15-Sep-1992 |
| URI: | http://hdl.handle.net/10045/4131 |
| Language: | spa |
| Type: | info:eu-repo/semantics/doctoralThesis |
| Appears in Collections: | Doctoral theses |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
 Villalvilla-Soria-Jose-Moises.pdf | 5,2 MB | Adobe PDF | Open Preview | |
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