Accuracy analysis of simplified and rigorous numerical methods applied to binary nanopatterning gratings in non-paraxial domain
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http://hdl.handle.net/10045/30215
| Title: | Accuracy analysis of simplified and rigorous numerical methods applied to binary nanopatterning gratings in non-paraxial domain |
|---|---|
| Authors: | Francés, Jorge | Bleda, Sergio | Gallego, Sergi | Neipp, Cristian | Márquez, Andrés | Pascual, Inmaculada | Beléndez, Augusto |
| Research Group/s: | Holografía y Procesado Óptico |
| Center, Department or Service: | Universidad de Alicante. Departamento de Física, Ingeniería de Sistemas y Teoría de la Señal | Universidad de Alicante. Departamento de Óptica, Farmacología y Anatomía | Universidad de Alicante. Instituto Universitario de Física Aplicada a las Ciencias y las Tecnologías |
| Keywords: | Scalar diffraction theory | Effective medium theory | Rigorous coupled wave theory | Finite-difference time domain | Optics | Diffraction efficiency |
| Knowledge Area: | Física Aplicada | Óptica |
| Issue Date: | 21-Jun-2013 |
| Publisher: | Elsevier |
| Citation: | FRANCÉS, Jorge, et al. "Accuracy analysis of simplified and rigorous numerical methods applied to binary nanopatterning gratings in non-paraxial domain". Physics Letters A. Vol. 377, Issues 34-36 (1 Nov. 2013). ISSN 0375-9601, pp. 2245-2250 |
| Abstract: | A set of simplified and rigorous electromagnetic vector theories is used for analyzing the transmittance characteristics of diffraction phase gratings. The scalar diffraction theory and the effective medium theory are validated with the exact results obtained via the rigorous coupled-wave theory and the finite-difference time-domain method. The effects of surface profile parameters and also the angle of incidence is demonstrated to be a limiting factor in the accuracy of these theories. Therefore, the error of both simplified theories is also analyzed in non-paraxial domain with the intention of establishing a specific range of validity for both simplified theories. |
| Sponsor: | This work was supported by the Ministerio de Economía y Competitividad of Spain under projects FIS2011-29803-C02-01, FIS2011-29803-C02-02 and by the Generalitat Valenciana of Spain under projects PROMETEO/2011/021, ISIC/2012/013, ACOMP/2013/075 and GV/2012/099. |
| URI: | http://hdl.handle.net/10045/30215 |
| ISSN: | 0375-9601 (Print) | 1873-2429 (Online) |
| DOI: | 10.1016/j.physleta.2013.05.059 |
| Language: | eng |
| Type: | info:eu-repo/semantics/article |
| Peer Review: | si |
| Publisher version: | http://dx.doi.org/10.1016/j.physleta.2013.05.059 |
| Appears in Collections: | INV - GHPO - Artículos de Revistas |
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| File | Description | Size | Format | |
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 PLA_v377_n34-36_p2245_2013.pdf | Versión final (acceso restringido) | 842,45 kB | Adobe PDF | Open Request a copy |
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