Sub-400 nm film thickness determination from transmission spectra in organic distributed feedback lasers fabrication

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Title: Sub-400 nm film thickness determination from transmission spectra in organic distributed feedback lasers fabrication
Authors: Bonal, Víctor | Quintana Arévalo, José Antonio | Muñoz-Mármol, Rafael | Villalvilla Soria, José Moisés | Boj Giménez, Pedro | Díaz-García, María A.
Research Group/s: Física de la Materia Condensada
Center, Department or Service: Universidad de Alicante. Departamento de Física Aplicada | Universidad de Alicante. Departamento de Óptica, Farmacología y Anatomía | Universidad de Alicante. Instituto Universitario de Materiales
Keywords: Distributed feedback lasers | Thin film thickness | Optical characterization | Transmission spectra
Knowledge Area: Física Aplicada | Física de la Materia Condensada | Óptica
Issue Date: 31-Dec-2019
Publisher: Elsevier
Citation: Thin Solid Films. 2019, 692: 137580. doi:10.1016/j.tsf.2019.137580
Abstract: The design and fabrication of thin-film based organic optoelectronic devices require knowledge of the film optical properties. A low-cost and non-destructive method often used for optical characterization of films is the well-established spectrophotometric envelope method. However, this method is typically limited to thickness above 400 nm, a value often higher than that of the films involved in these devices. This paper studies a procedure to obtain the thickness of sub-400 nm active films from their spectrophotometric trace when the refractive index is previously known. The proposed procedure is based on comparing the experimental transmission spectrum in the transparent spectral window with that obtained by simulation. The capabilities of the proposed method are demonstrated here by its application in the fabrication of organic distributed feedback lasers, for which a fine control of film thickness is important to obtain an optimized and reproducible response. Results are verified with other techniques, such as ellipsometry and profilometry. Thus, with the proposed method, film thickness can be easily determined down to 40 nm maintaining an accuracy of about 5 nm even for films with low refractive index (1.5–1.7). Different methods to determine refractive index of these films are also discussed.
Sponsor: Spanish Ministry of Economy and Competitivity (MINECO) and European Community (FEDER) through grant no. MAT2015-66586-R.
ISSN: 0040-6090 (Print) | 1879-2731 (Online)
DOI: 10.1016/j.tsf.2019.137580
Language: eng
Type: info:eu-repo/semantics/article
Rights: © 2019 Elsevier B.V.
Peer Review: si
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Appears in Collections:INV - Física de la Materia Condensada - Artículos de Revistas

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