Spatial profile of deposited energy by the sputtered flux in a glow discharge

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Title: Spatial profile of deposited energy by the sputtered flux in a glow discharge
Authors: Moreno Marín, Juan Carlos | Abril, Isabel | García Molina, Rafael | Pérez Martín, A.M.C. | Jiménez Rodríguez, J.J.
Research Group/s: Interacción de Partículas Cargadas con la Materia
Center, Department or Service: Universidad de Alicante. Departamento de Física, Ingeniería de Sistemas y Teoría de la Señal | Universidad de Alicante. Departamento de Física Aplicada
Keywords: Glow discharges | Sputtering | Plasma | Thin film deposition
Knowledge Area: Física Aplicada
Issue Date: Sep-1997
Publisher: Elsevier Science
Citation: MORENO-MARÍN, J.C., et al. "Spatial profile of deposited energy by the sputtered flux in a glow discharge". Vacuum. Vol. 48, No. 7-9 (Sept. 1997). ISSN 0042-207X, pp. 685-688
Abstract: We present a self-consistent analysis of a glow discharge sputtering system where the generation of the energetic particles that bombard the cathode, the sputtering process, and the transport through the plasma of the emitted particles from the cathode, are evaluated as coupled processes. Within this scheme we calculate the radial spatial profile of the deposited energy onto the film, carried by the flux of sputtered particles; the influence of the gas pressure and the vacuum chamber geometry are both discussed.
Sponsor: We acknowledge financial support from the Spanish DGICYT (projects PB95-0689, PB93-1125 and PB94-0283).
ISSN: 0042-207X (Print) | 1879-2715 (Online)
DOI: 10.1016/S0042-207X(97)00056-0
Language: eng
Type: info:eu-repo/semantics/article
Peer Review: si
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Appears in Collections:INV - IPCM - Artículos de Revistas

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