Radial profile of energetic particles bombarding the substrate in a glow discharge

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Title: Radial profile of energetic particles bombarding the substrate in a glow discharge
Authors: Moreno Marín, Juan Carlos | Abril, Isabel | García Molina, Rafael
Research Group/s: Interacción de Partículas Cargadas con la Materia
Center, Department or Service: Universidad de Alicante. Departamento de Física, Ingeniería de Sistemas y Teoría de la Señal | Universidad de Alicante. Departamento de Física Aplicada
Keywords: Glow discharge | Energetic particles | Substrate | Radial profiles
Knowledge Area: Física Aplicada
Issue Date: 1999
Publisher: American Vacuum Society
Citation: MORENO-MARÍN, Juan Carlos; ABRIL, Isabel; GARCIA MOLINA, Rafael. "Radial profile of energetic particles bombarding the substrate in a glow discharge". Journal of Vacuum Science & Technology A. Vol. 17, No. 2 (1999). ISSN 0734-2101, pp. 528-534
Abstract: We have analyzed in an interrelated way the main processes that occur in a glow discharge system: generation of the energetic particles that strike the cathode, emission of sputtered and reflected atoms from the cathode, and transport of these particles through the plasma, until their eventual arrival to the substrate. As an output of our calculations we have obtained the radial profiles of the energy and the number of particles that reach the substrate, as a function of the geometrical characteristics and pressure of the discharge. Our results show that the main part of the energy deposited in the substrate comes from the reflected gas atoms, in spite of the larger number of sputtered cathode atoms.
Sponsor: This work is supported by the Spanish Dirección General de Investigación Científica y Técnica (Projects PB95-0689 and PB96-1118).
URI: http://hdl.handle.net/10045/25360
ISSN: 0734-2101 (Print) | 1520-8559 (Online)
DOI: 10.1116/1.581614
Language: eng
Type: info:eu-repo/semantics/article
Rights: Copyright 1999 American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society. The following article appeared in J. Vac. Sci. Technol. A 17, 528 (1999) and may be found at http://link.aip.org/link/doi/10.1116/1.581614
Peer Review: si
Publisher version: http://dx.doi.org/10.1116/1.581614
Appears in Collections:INV - IPCM - Artículos de Revistas

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